JPH074509Y2 - 微少流量センサ - Google Patents
微少流量センサInfo
- Publication number
- JPH074509Y2 JPH074509Y2 JP17846387U JP17846387U JPH074509Y2 JP H074509 Y2 JPH074509 Y2 JP H074509Y2 JP 17846387 U JP17846387 U JP 17846387U JP 17846387 U JP17846387 U JP 17846387U JP H074509 Y2 JPH074509 Y2 JP H074509Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- flow rate
- temperature measuring
- measuring element
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000012530 fluid Substances 0.000 claims description 16
- 238000011144 upstream manufacturing Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 229920003002 synthetic resin Polymers 0.000 claims description 10
- 239000000057 synthetic resin Substances 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17846387U JPH074509Y2 (ja) | 1987-11-24 | 1987-11-24 | 微少流量センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17846387U JPH074509Y2 (ja) | 1987-11-24 | 1987-11-24 | 微少流量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0181524U JPH0181524U (en]) | 1989-05-31 |
JPH074509Y2 true JPH074509Y2 (ja) | 1995-02-01 |
Family
ID=31470078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17846387U Expired - Lifetime JPH074509Y2 (ja) | 1987-11-24 | 1987-11-24 | 微少流量センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH074509Y2 (en]) |
-
1987
- 1987-11-24 JP JP17846387U patent/JPH074509Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0181524U (en]) | 1989-05-31 |
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